Microelectronics

A few uncollected particles or gas molecules can have extremely serious consequences in some processes. Just imagine what harm contaminated air could do to the manufacture of semiconductors, pharmaceuticals and to other highly sensitive processes.

Advanced production methods often require very clean air and in many cases these requirements are certain to increase. For example, the electronics industry needs a very clean manufacturing environment for VLSI (Very Large Scale Integrated) circuit production. The pattern width on the circuits can be 1 micrometre or less. The need will be to control particle contamination down to1/10 of third dimension (0.1 micrometre).

The heart of the cleanroom is its filters, but there are a number of considerations regarding room classification, choice of filter, and how filters influence the environment.

Camfil Farr is well positioned to recommend the best solution for advanced particle and AMC control thanks to more than 15 years experience in the field of microelectronics and semiconductor contamination control, and through our involvement in the International Technology Roadmap for Semiconductors.

HEPA/ULPA filters are produced within controlled environments in Camfil Farr’s ISO 9000 certified plants. We can produce the same type of filters at multiple manufacturing sites. Our large production capacity ensures the availability of our products at all times throughout the world.

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